TORR High Pressure Regulator for Semi Conductor Use

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Ultra-Clean Gas Control
Designed for high-purity semiconductor applications ensuring stable gas flow and zero contamination.
High Pressure Performance
Withstands and regulates inlet pressures up to 35 MPa for precise pressure control under demanding conditions.
Precision Machined Body
Constructed from corrosion-resistant materials with fine internal surface finishing to maintain gas purity and accuracy.

Category: . Brand: TANAKA Japan

Model	Inlet pressure gauge (MPa)	Outlet Pressure Gauge (MPa)	Max. Working Pressure (MPa)	Flow Rate (at NL/min)	Weight (kg)
TORR-1000	25 (Max. 15)	0.3	0.2	250NL/min (P2=0.5)	1.3
TORR-2300	25 (Max. 15)	0.5	0.4	1,400NL/min (P2=0.5)	1.8
TORR-2500	25 (Max. 15)	1.0	0.6	900NL/min (P2=0.5)	4.9
TORR-3300	25 (Max. 15)	1.5	0.9	1,200NL/min (P2=0.5)	14
TORR-2800 *Corrosion gas	25 (Max. 15)	0.3	0.2	1,400NL/min (P2=0.5)	6.7
		0.5	0.4
		1.0	0.6
TORR-H *High pressure	25 (Max. 15) 35 (Max. 15)	5	3	800NL/min (P2=6.0)	2
		10	6
		20	12