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Torr Low Pressure Regulator for Semi Conductor
The Torr Low Pressure Regulator is specially engineered for semiconductor and laboratory applications where precise pressure control is critical. It ensures ultra-stable low-pressure output with excellent repeatability and leak integrity. Constructed with high-purity materials, it minimizes contamination and ensures consistent gas flow. Ideal for cleanroom and high-tech process environments demanding accuracy and reliability.
Features:
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1)Ultra-precise low-pressure regulation
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2) High-purity construction for contamination control
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3) Excellent repeatability and long service life
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4) Compact, durable design for cleanroom use
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5) Compatible with specialty and inert ga
*Applied Gases for TORR Series
O₂, N₂, Ar, H₂, He, CO₂, Ne, Xe, Kr, B₂H₆, SiH₄, PH₃, GeH₄, AsH₃, H₂Se, Si₂H₆, NF₃, BF₃, PF₅, SiF₄, CF₄, CHF₃, CH₂F₂, C₃F₈,
C₄F₈, C₅F₈, C₆F₆, C₇F₈, CO, NO, F₂, HF, HCl, HBr, N₂O, SF₆, NH₃, Cl₂, BCl₃, ClF₃, SiH₂Cl₂, SiCl₄, WF₆ …
| Model | Inlet pressure gauge (MPa) | Outlet Pressure Gauge (MPa) | Max. Working Pressure (MPa) | Flow Rate (at NL/min) | Weight (kg) |
|---|---|---|---|---|---|
| TORR-30 | Nil (Max. 5) | 0.3 | 0.2 | 300NL/min (P2=0.4) | 1.1 |
| 0.5 | 0.4 | ||||
| TORR-50 | Nil (Max. 3.5) | 0.6 | 0.4 | 800NL/min (P2=0.4) | 1.6 |
| 1.0 | 0.6 | ||||
| 1.5 | 0.99 | ||||
| TORR-40 | Nil (Max. 2) | 0.3 | 0.2 | 400NL/min (P2=1.0) | 3 |
| TORR-150 | Nil (Max. 2) | 1.0 | 0.8 | 1,400NL/min (P2=1.0) | 3.7 |
| TORR-350 | Nil (Max. 1.5) | 1.0 | 0.8 | 2,200NL/min (P2=1.0) | 15 |
| TORR-800 | Nil (Max. 1) | 1.5 | 1.0 | 3,000NL/min (P2=1.0) | 32 |
Flowtemp is a trusted value-added channel partner for Japanese high-performance gas cutting and welding equipment in India for over 30 years. We specialize in automatic & CNC cutting machines, regulators, heaters, and allied accessories, serving small, medium, and large industries , that will make india globally competitive.
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